Analysis of Intelligent Control System in Lithography Machine
This paper describes the key technologies of intelligent control systems for lithography machines and analyzes their application prospects in chip manufacturing.Through modeling,optimization algorithms,intelligent perception and data collection technology,as well as the application of artificial intelligence and machine learning,the automation and optimization of the lithography process can be achieved.This system is of great significance for improving production efficiency,reducing costs,and improving product quality,and for the development of the chip manufacturing industry.
lithography machineintelligent control systemintegrated circuit manufacturing
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