高灵敏度柔性多层等强度梁式力传感器的设计
Design of High Sensitivity Flexible Multilayer Equal Strength Beam Force Sensor
叶智鹏 1张晨辉1
作者信息
- 1. 西安建筑科技大学 理学院,陕西 710055
- 折叠
摘要
阐述设计并制备的一种柔性多层等强度梁式传感器,通过力移加载试验对传感器电容变化量与梁自由端力进行测试,传感器对力的灵敏度最高为1.855mN/pF,具有高灵敏度与线性度.
Abstract
This paper describes the design and preparation of a flexible multi-layer beam type sensor with equal strength.The capacitance change of the sensor and the free end force of the beam are tested through force transfer loading tests.The sensor has the highest sensitivity to force of 1.855mN/pF,with high sensitivity and linearity.
关键词
柔性传感器/等强度悬臂梁/加载试验Key words
flexible sensors/equal strength cantilever beams/loading tests引用本文复制引用
出版年
2024
NETL
NSTL
万方数据