Analysis of Product Identification Technology for PE3061 Device Wafer Position Deviation
This paper describes that the LPE3061 epitaxial device,as the main machine for MOS product epitaxial production,has an abnormal phenomenon of silicon wafer position deviating from the base pit position during the production process.By analyzing the uniformity of product parameters and the variability of product appearance,it explores the boundary conditions and applicability of existing product detection and recognition mechanisms.
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