This paper expounds the challenges faced by wafer handling robots in intelligent semiconductor devices,including environmental adaptability,safety and reliability,as well as data management and integration.By addressing these challenges,it can better adapt to complex manufacturing environments,achieve efficient data management and seamless integration.
关键词
集成电路制造/智能化半导体设备/晶圆搬运机械手
Key words
integrated circuit manufacturing/intelligent semiconductor equipment/wafer handling robotic arm
维普
万方数据