Overview of the Application of Wafer Handling Robots in Semiconductor Equipment
This paper expounds the challenges faced by wafer handling robots in intelligent semiconductor devices,including environmental adaptability,safety and reliability,as well as data management and integration.By addressing these challenges,it can better adapt to complex manufacturing environments,achieve efficient data management and seamless integration.
integrated circuit manufacturingintelligent semiconductor equipmentwafer handling robotic arm
万方数据
维普
