Analysis of Industrialization Issues in Nanoimprint Lithography
This paper describes that nanoimprint lithography is a new type of advanced manufacturing technology for micro and nano processing,which has advantages such as high resolution,high yield,and low cost.It has broad application prospects in fields such as optics,integrated circuits,data storage,and life sciences.It introduces the principle of nanoimprint lithography,analyzes the industrialization issues of nanoimprint lithography,and provides suggestions for the development of nanoimprinting industrialization in China based on the actual situation.
NETL
NSTL
万方数据
