This paper describes a high-precision on-chip integrated clock oscillator circuit,with a ring oscillator architecture used as the starting core and a typical output clock frequency of 9.8MHz.The circuit integrates an initial frequency calibration circuit and a temperature compensation circuit internally.After initial frequency calibration,the output clock frequency of the circuit can achieve good temperature characteristics.The test results show that the frequency deviation of the circuit can be controlled within an accuracy range of±1%within the temperature range of-45~125℃.The circuit is implemented using 55nm technology,and the overall power consumption of the circuit is 60μA,the layout area is approximately 50 000μm2,startup time less than 20μs.In order to reduce the voltage characteristics of the output frequency,the circuit is powered by an internally integrated LDO.