Practice of Thin Film Practical Teaching System Based on Engineering Application Ability Cultivation
This paper expounds elaborates on the learning requirements of microelectronics students for the theory and practice of thin film courses,and customizes a coating equipment that integrates three coating methods:resistance evaporation,electron beam evaporation,and magnetron sputtering.Through innovative teaching practices,students will acquire basic skills in the installation,debugging,fault analysis,and troubleshooting of vacuum equipment and thin film equipment,and master the process design of thin film preparation and the use of vacuum coating equipment.
thin film processpractical teachingengineering applicationscurriculum system
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