TOPCon电池中的EL卡点印缺陷分析
Analysis of EL Card Dot Print Defects in TOPCon Batteries
李国庆 1居瑞智 1谢路华 1李香伟 1谢致任1
作者信息
- 1. 深圳市捷佳伟创新能源装备股份有限公司,广东 518118
- 折叠
摘要
阐述PE-Poly是N型TOPCon太阳电池工艺中的难点与关键,电致发光(EL)卡点印是PE-Poly路线TOPCon电池主要缺陷之一.基于PE-poly路线TOPCon电池量产设备和工艺,通过电性能测试、椭偏仪测试、QE测试以及对比实验,针对此类电池EL缺陷问题进行分类研究,为电池片制程良率提升提供改善方向.
Abstract
This paper describes the difficulty and key of PE Poly in the N-type TOPCon solar cell process,and electroluminescence(EL)checkpoint printing is one of the main defects of the PE Poly route TOPCon battery.Based on the PE poly route TOPCon battery mass production equipment and process,it conducts classification research on EL defects in such batteries through electrical performance testing,ellipsometer testing,QE testing,and comparative experiments,providing improvement directions for improving the process yield of battery cells.
关键词
TOPCon电池/PE-Poly/隧穿氧化层/原位掺杂/界面Key words
TOPCon battery/PE Poly/tunneling oxide layer/in-situ doping/interface引用本文复制引用
出版年
2024
NETL
NSTL
万方数据