PECVD上下料控制系统的设计
Design of Automatic Loading and Unloading Device for PECVD Equipment
吕新春 1钟广超 1余雪昆 2熊镇西 3毛浩杰 1吴光宇2
作者信息
- 1. 湖南红太阳光电科技有限公司,湖南 4102211
- 2. 湖南深拓智能设备股份有限公司,湖南 410205
- 3. 西南石油大学 电气信息学院,四川 610500
- 折叠
摘要
阐述自动上下料装置作为PECVD设备的组成部分,是实现生产自动化作业的重要一环.介绍PECVD设备上下料原理及主要构成,设计基于PLC、EtherCat总线及各类传感器构成的自动上下料控制系统.生产实践表明,系统可满足PECVD设备上下料过程的准确性、稳定性和可靠性.
Abstract
This paper describes that the automatic loading and unloading device,as a component of PECVD equipment,is an important part of achieving production automation operations.It introduces the loading and unloading principle and main components of PECVD equipment,and designs an automatic loading and unloading control system based on PLC,EtherCat bus,and various sensors.Production practice has shown that the system can meet the accuracy,stability,and reliability of the loading and unloading process of PECVD equipment.
关键词
PECVD/自动上下料/PLC/EtherCatKey words
PECVD/automatic loading and unloading/PLC/EtherCat引用本文复制引用
出版年
2024
NETL
NSTL
万方数据