Design of Automatic Loading and Unloading Device for PECVD Equipment
This paper describes that the automatic loading and unloading device,as a component of PECVD equipment,is an important part of achieving production automation operations.It introduces the loading and unloading principle and main components of PECVD equipment,and designs an automatic loading and unloading control system based on PLC,EtherCat bus,and various sensors.Production practice has shown that the system can meet the accuracy,stability,and reliability of the loading and unloading process of PECVD equipment.
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