Design of an L～U Band RF MEMS Single-blade 10-throw Switch
An RF MEMS single-blade 10-throw switch for the 1～60 GHz frequency band is proposed is this paper.The switch adopts a triangular upper electrode structure to reduce the cantilever beam equivalent elastic coefficient and closed contact area to achieve low drive voltage and high isolation.The signal loss problem is improved by step compensation by asymptotic transmission line structure is improved.The simulation results show that the drive voltage of this single-blade 10-throw switch is 13V.In the fre-quency range of 1GHz～60GHz,the insertion loss of the output ports on both sides of the input is<2dB,insertion loss of the remain-ing eight ports £ 0.59dB,and the isolation of all ports is>30dB.This switch can be used in wireless communication systems,radar systems and instrumentation measurement systems where high RF performance is required.
wide bandsingle throw switchRF MEMS switchtriangular upper electrodeprogressive transmission line
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