The system differs from previous optical sensors in that a new material,gallium arsenide,is applied to an optical micro-electromechanical system(MEMS)sensor in the system.Based on the characteristics of GaAs and wavelength modulation analysis,an optical MEMS sensor suitable for high frequency fields is designed.In addition,the finite element analysis(FEA)method of ANSYS and the rigorous coupled wave analysis(RCWA)method are used.Compared with other high-frequency sensors,it shows that the proposed sensor has advantages in terms of characteristics such as wide measurement range,high sensitivity,and almost zero cross-axis axis sensitivity.The optical sensitivity of the proposed optical sensor is 2.99276 and the mechanical sensitivi-ty is 0.54nm/g.The first resonance frequency is 23658.6Hz,the linear measurement range is±135g,and the sensitivity of the sens-ing system is 161.61 nm/g with an operating bandwidth of 0～23.6kHz.
关键词
应用光学/速度与加速度计量/半导体材料(砷化镓)/高灵敏度
Key words
applied optics/velocity and acceleration metrology/semiconductor materials(gallium arsenide)/high sensitivi-ty
维普
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