Design and Performance Study of Thermopile-based MEMS Gas Flow Sensor
A thermal MEMS gas flow sensor consisting of a microheater and a thermopile is proposed to achieve highly sensi-tive,fast response and low power consumption for gas flow measurement.The thermopile structure uses N/P type heavily doped poly-silicon to construct a double stacked structure,which can achieve low thermal conductivity and high seeebeck coefficient with high-er temperature sensitivity.Experimental tests show that the sensor device has a sensitivity of 0.309 mV/sccm(i.e.,58.22 mV/ms-1)in the airflow range of 0～1000 sccm,a response time of only about 139 ms,and a microheater heating power consumption of only 34.9 mW at an operating voltage of 2.56 V.The overall size of the sensor is only 1300 mm×1300 mm,which is conducive to the min-iaturization and integration of the detection system.Application value in flow rate flow detection scenarios such as ship and land vehi-cle powered hydrogen fuel cells,medical assisted breathing equipment.
thermopileMEMSdouble stacked structurethermal gas flow sensor
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