热电堆式MEMS气体流量传感器设计及性能研究
Design and Performance Study of Thermopile-based MEMS Gas Flow Sensor
刘泽民 1张琛琛 2毛海央 2周娜2
作者信息
- 1. 中北大学仪器与电子学院 太原 030051
- 2. 中国科学院微电子研究所 北京 100029
- 折叠
摘要
提出一种由微加热器和热电堆构成的热式MEMS气体流量传感器用以实现高灵敏、快响应且低功耗的气体流量检测.采用N/P型重掺杂多晶硅材料构造双层堆叠的热电堆结构,可以实现低热导和高塞贝克系数,具有更高的温度敏感性.实验测试表明,该传感器件在0～1000 sccm的气流范围内灵敏度可达0.309 mV/sccm(58.22 mV/ms-1),响应时间仅约139 ms,其工作电压为2.56 V时,微加热器的加热功耗仅有34.9 mW.该器件的整体尺寸仅有1300 mm×1300 mm,有利于检测系统的小型化和集成化,在动力氢燃料电池、医疗辅助呼吸设备等流速流量检测场景中具有一定应用价值.
Abstract
A thermal MEMS gas flow sensor consisting of a microheater and a thermopile is proposed to achieve highly sensi-tive,fast response and low power consumption for gas flow measurement.The thermopile structure uses N/P type heavily doped poly-silicon to construct a double stacked structure,which can achieve low thermal conductivity and high seeebeck coefficient with high-er temperature sensitivity.Experimental tests show that the sensor device has a sensitivity of 0.309 mV/sccm(i.e.,58.22 mV/ms-1)in the airflow range of 0～1000 sccm,a response time of only about 139 ms,and a microheater heating power consumption of only 34.9 mW at an operating voltage of 2.56 V.The overall size of the sensor is only 1300 mm×1300 mm,which is conducive to the min-iaturization and integration of the detection system.Application value in flow rate flow detection scenarios such as ship and land vehi-cle powered hydrogen fuel cells,medical assisted breathing equipment.
关键词
热电堆/MEMS/双层堆叠结构/热式气体流量传感器Key words
thermopile/MEMS/double stacked structure/thermal gas flow sensor引用本文复制引用
出版年
2024
国家科技期刊平台
NSTL
万方数据