卍字型无线高温高压传感器的设计与研究
Design and Research of Swastika Type Wireless High Temperature and High Pressure Sensor
翟荣锭 1吴倩楠1
作者信息
- 1. 中北大学半导体与物理学院 太原 030051;中北大学前沿交叉科学研究院 太原 030051;中北大学微系统集成研究中心 太原 030051
- 折叠
摘要
论文介绍了一种利用硅碳氮(SiCN)材料制成的无线高温高压传感器.可以解决目前温度压力传感器所存在的量程狭窄、体积大、敏感度不足的问题.传感器由金属、硅碳氮基板和金属三层结构组成.结果显示,设计好的高温传感器可用于测量27℃～1 000℃范围内的温度,温度灵敏度约为0.77 GHz/℃,并可检测10 MPa～100 MPa的压力,压力灵敏度0.159 GHz/MPa.该传感器探测范围广泛,在航空发动机、工业生产、通信等领域提供技术支持.
Abstract
This paper introduces a wireless high temperature and high pressure sensor made of silicon-carbon-nitrogen (SiCN)material. It can solve the problems of narrow range,large volume and insufficient sensitivity of current temperature and pres⁃ sure sensors. The sensor is composed of metal,silicon carbon nitrogen substrate and metal three-layer structure. The results show that the designed high temperature sensor can be used to measure the temperature in the range of 27℃～1 000℃,the temperature sensitivity is about 0.77 GHz/℃,and it can detect the pressure of 10 MPa～100 MPa,the pressure sensitivity is 0.159 GHz/MPa. The sensor has a wide detection range and provides technical support in the fields of aviation engines,industrial production,and communications.
关键词
材料/硅碳氮/温度传感/压力传感/太赫兹Key words
material/silicon carbon nitrogen/temperature sensing/pressure sensing/terahertz引用本文复制引用
出版年
2024
国家科技期刊平台
NSTL
万方数据