Design and Research of Swastika Type Wireless High Temperature and High Pressure Sensor
This paper introduces a wireless high temperature and high pressure sensor made of silicon-carbon-nitrogen (SiCN)material. It can solve the problems of narrow range,large volume and insufficient sensitivity of current temperature and pres⁃ sure sensors. The sensor is composed of metal,silicon carbon nitrogen substrate and metal three-layer structure. The results show that the designed high temperature sensor can be used to measure the temperature in the range of 27℃～1 000℃,the temperature sensitivity is about 0.77 GHz/℃,and it can detect the pressure of 10 MPa～100 MPa,the pressure sensitivity is 0.159 GHz/MPa. The sensor has a wide detection range and provides technical support in the fields of aviation engines,industrial production,and communications.
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