电磁力驱动的光栅泰伯MOEMS加速度计设计与分析
Design and Analysis of Grating-Talbot-based MOEMS Accelerometer Driven by Electromagnetic Force
罗戴钟 1徐浩东 1金丽 1李孟委1
作者信息
- 1. 中北大学仪器与电子学院 太原 030051;中北大学前沿交叉科学研究院 太原 030051
- 折叠
摘要
为提高MEMS加速度计灵敏度与线性工作范围,论文提出一种基于泰伯效应的双层衍射光栅透射式MOEMS加速度计,对其进行光学效应分析、结构与工艺设计.通过有限元分析,确定加速度计工作模态的固有频率为147.25Hz,结构灵敏度为11.5 μm/g,光学检测线性范围为3.3 μm.通过对结构施加预应力的方式,将加速度计线性工作范围提高4.75倍,为新型光栅加速度计的制造与测试奠定了理论基础.
Abstract
To improve the sensitivity and linear operation range of MEMS accelerometers,this paper proposes a MOEMS ac-celerometer based on the Talbot effect of double-layer diffraction grating,and conducts optical effect analysis,structural and pro-cessing design.Through finite element analysis,the natural frequency of the working mode of the accelerometer is determined to be 147.25 Hz,the structural sensitivity is 11.5 μm/g,and optical sensitivity is 3.3 μm.By applying pre-stress to the structure,the lin-ear working range of the accelerometer is increased by 4.75 times,laying a theoretical foundation for the manufacturing and measure-ment of the new grating accelerometer.
关键词
加速度计/泰伯效应/双层光栅/工艺设计Key words
accelerometer/Talbot effect/double layer grating/technological processing引用本文复制引用
出版年
2024
国家科技期刊平台
NSTL
万方数据