Design and Analysis of Grating-Talbot-based MOEMS Accelerometer Driven by Electromagnetic Force
To improve the sensitivity and linear operation range of MEMS accelerometers,this paper proposes a MOEMS ac-celerometer based on the Talbot effect of double-layer diffraction grating,and conducts optical effect analysis,structural and pro-cessing design.Through finite element analysis,the natural frequency of the working mode of the accelerometer is determined to be 147.25 Hz,the structural sensitivity is 11.5 μm/g,and optical sensitivity is 3.3 μm.By applying pre-stress to the structure,the lin-ear working range of the accelerometer is increased by 4.75 times,laying a theoretical foundation for the manufacturing and measure-ment of the new grating accelerometer.
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