柔性电子制造领域的超快激光技术:机制、特征功用及挑战(特邀)
Ultrafast Laser Technology for Fabricating Flexible Electronics:Mechanisms,Functions,and Challenges(Invited)
季凌飞 1孙伟高 1林真源 1周博昊 1程维 1温亚楠 1王冠强1
作者信息
- 1. 北京工业大学材料与制造学部激光工程研究院,北京 100124;北京工业大学跨尺度激光成型制造技术教育部重点实验室,北京 100124;北京市激光应用技术工程技术研究中心,北京 100124
- 折叠
摘要
随着智能化时代的到来,柔性电子由于其极强的共形能力和优异的器件性能,在进一步推动现代化产业发展中取得越来越重要的地位.超快激光技术以其优异的高精制造能力在柔性电子高分辨无损制备上展示出独特的优势和应用前景.本文从超快激光与物质相互作用基本机制入手,着重介绍了当前超快激光在柔性电子领域的四种典型特征功用及其研究现状,并据此总结该领域超快激光应用所面临的挑战和未来发展趋势.
Abstract
With the advent of the intelligence age,flexible electronics have been increasing importance in the development of modern industries owing to their extremely strong conformal capability and excellent device performance.Ultrafast laser technology possesses unique advantages and application prospects in the high-resolution non-destructive fabrication of flexible electronics because of its superior capability in high precision manufacturing.In this study,the basic mechanism of ultrafast laser-matter interaction is first introduced.Afterward,the cutting-edge applications and research status of four typical ultrafast laser technologies used in the current field of flexible electronics are presented.Accordingly,the challenges and future development trends in ultrafast laser application in the field are summarized and prospected.
关键词
超快激光/柔性电子/微纳加工Key words
ultrafast laser/flexible electronics/micro-nano fabrication引用本文复制引用
基金项目
国家自然科学基金(51975017)
北京市教委重点科研项目(KZ202110005012)
北京市自然科学基金-海淀联合基金重点项目(L222011)
国家重点研发计划(2018YFB1107500)
出版年
2024
NETL
NSTL
万方数据