Research Progress on Key Technologies of Chromatic Confocal Sensors(Invited)
Precision measurement technology is the cornerstone of the rapid advancement of advanced manufacturing.Chromatic confocal sensors,with technological advantages such as high measurement accuracy,rapid detection speed,and high system integration,have become one of the precision measurement technologies currently garnering significant attention in the field of advanced manufacturing.This article begins by introducing the principles of chromatic confocal measurement and analyzing the crucial components comprising the chromatic confocal sensor.Subsequently,focusing on point chromatic confocal sensors,it provides an overview of the research progress in key technologies such as the dispersive objective lens,broad-spectrum light source,spectral detection device,and spectral processing algorithms that constitute the sensor.In the case of line scanning chromatic confocal sensors,it summarizes the critical technologies related to scanning methods,optical path structures,spectral detection devices,and methods for processing spectral information.Finally,it concludes by summarizing the current research focus,challenges,and future technological development directions of chromatic confocal sensors.
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