激光光束整形技术研究进展
Research Progress of Laser Beam Shaping Technology
亓岩 1朱英杰 1张晶 2王延伟 1周密 2孙晨曦 1颜博霞 1韩巍 3王宇1
作者信息
- 1. 中国科学院大学集成电路学院,北京100049;中国科学院微电子研究所光电技术研发中心,北京100094
- 2. 中国科学院微电子研究所光电技术研发中心,北京100094
- 3. 北京积水潭医院,北京100035
- 折叠
摘要
激光器谐振腔输出的光束呈高斯分布,需要通过光束整形来提高均匀性,以满足应用的需求.从光学系统的特性出发,总结归纳了当前主要的三种激光光束整形技术,包括光阑法、场映射器法和多孔径光束聚焦法,分别介绍了三种激光光束整形技术的基本原理、应用范围和主要实现方法,阐述了不同激光光束整形方法的典型应用和研究进展,最后,综合讨论了激光光束整形技术目前所面临的问题及未来的发展方向.本综述对激光光束整形技术的研究具有一定的参考意义.
Abstract
The output beam of the laser resonator is Gaussian,which makes it often unable to be used directly.It is necessary to improve the uniformity through beam shaping to meet the application requirements.Starting from the characteristics of optical system,this paper summarizes three main laser beam shaping technologies,including aperture method,field mapper method,and multi-aperture beam focusing method,respectively introduces the basic principle,application range,and main realization methods of three laser beam shaping technologies,and expounds the typical application and research progress of different laser beam shaping methods.Finally,the current problems and future development of laser beam shaping technology are comprehensively discussed.This review has certain reference significance for the research of laser beam shaping technology.
关键词
光束整形/光阑/场映射器/多孔径光束聚焦Key words
beam shaping/aperture/field mapper/multi-aperture beam focusing引用本文复制引用
出版年
2024
NETL
NSTL
万方数据