Chromatic confocal microscopy(CCM)combines the high spatial resolution of confocal microscope and the high wavelength resolution of spectral analysis.By virtue of the high precision,strong applicability,and nondestructive detection,it is widely used in the fields of industrial production,biomedicine,semiconductor chips,and other fields.This paper first introduces the principle of point chromatic confocal system and points out its drawback of low detection efficiency.Second,for improving the key performance indexes of chromatic confocal microscopy,the main achievements made in light source,dispersive objective lens,and spectral signal detection are described,and qualitative comparisons are made between various types of light sources.Subsequently,the scanning methods of chromatic confocal microscopy are demonstrated,the relevant research progress is sorted out,and the advantages and disadvantages of the relevant methods are summarized.Finally,the future developments of chromatic confocal microscopy are also prospected.
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