多条薄膜铌酸锂波导热光移相器设计与性能对比
Designs and Comparisons of Heater Configurations in Thermo-Optic Phase-Shifters Comprising Multiple Thin-Film Lithium Niobate Waveguides
卢金龙 1郝婷 2李志浩 1周赤 2吉贵军2
作者信息
- 1. 天津大学精密仪器与光电子工程学院,天津 300072;珠海光库科技股份有限公司,广东 珠海 519080
- 2. 珠海光库科技股份有限公司,广东 珠海 519080
- 折叠
摘要
通过多物理场模拟对比了不同加热电路时三条薄膜铌酸锂波导情况下热光移相器的温度分布、调制效率与瞬态响应.结果显示:薄膜铌酸锂热光移相器总阻值不变的情况下,在仅有一条位于中心波导正上方的加热电极时具有最高的热调制效率;采用多条离散分布的加热电阻经优化后可在调制效率基本不变的情况下获得更优的热串扰,尤其适用于多波导集成时的局部调制;三维多物理场模拟结果显示优异的热调制效率(约34 mW),且器件瞬态响应时间约为180 μs.
Abstract
Using multi-physics simulations,this study compares the temperature distributions,modulation efficiencies,and transient responses of a thermo-optical phase-shifter across three thin-film lithium niobate(TFLN)waveguides equipped with different heating circuits.The results reveal that the TFLN thermo-optical phase-shifter exhibits optimal modulation efficiency when the heating circuit is installed directly above the central waveguide.Alternatively,heating circuits with multiple resistors yield similar modulation efficiencies with reduced thermal crosstalk,making them particularly suitable for localized modulation in scenarios necessitating the integration of multiple waveguides.Three-dimensional multi-physics simulation results demonstrate a reasonable thermal modulation efficiency(approximately 34 mW)of the thermo-optical phase-shifter with a transient response time of approximately 180 μs.
关键词
薄膜铌酸锂/热光移相器/多波导集成/多物理场模拟Key words
thin-film lithium niobate/thermo-optical phase-shifter/multiple waveguides integration/multi-physics simulation引用本文复制引用
基金项目
国家重点研发计划(2021YFB2800064)
国家重点研发计划(2023YFB2807200)
珠海市产学研合作项目(ZH22017001210108PWC)
出版年
2024
NETL
NSTL
万方数据