基于梯度方差聚焦评价的三维显微测量方法
Three-Dimensional Microscopic Measurement Based on Gradient Variance for Focus Evaluation
董正琼 1杨清锋 1黄贤文 1王婧怡 1谢怡君 1祝仁龙 1周向东 1聂磊1
作者信息
- 1. 湖北工业大学机械工程学院现代制造质量工程湖北省重点实验室,湖北 武汉 430068
- 折叠
摘要
为实现高精度聚焦显微三维测量,在传统Brenner评价函数的基础上考虑垂直和对角方向的图像灰度梯度变化信息,提出一种基于梯度方差聚焦评价的三维显微测量方法,通过获取更为丰富的图像边缘信息可改善聚焦评价函数的灵敏度,进而提高聚焦显微三维测量精度.对高度标称值为1 mm的台阶样件开展了测量实验研究,所提方法得到的测量相对误差为0.49%(以标称值为基准),优于传统聚焦评价测量方法对应的1.22%;评价函数的清晰度比率和灵敏度分别为2.4412和318.45.
Abstract
A three-dimensional microscopic measurement based on gradient variance is proposed for focus evaluation to achieve high-precision focusing.Building upon the traditional Brenner evaluation function,this method incorporated information on changes in the grayscale gradient along the vertical and diagonal directions.Additionally,by capturing richer image edge details,it enhances the sensitivity of the focus evaluation function,thereby improving the accuracy of three-dimensional microscopic measurements.Experiments with a step sample having a nominal height of 1 mm were conducted,yielding a relative measurement error of 0.49%(relative to the standard value)for the proposed method,outperforming traditional focus evaluation methods with an error of 1.22%.Furthermore,for the evaluation function,the proposed method exhibits a clarity ratio and a sensitivity with values of 2.4412 and 318.45,respectively.
关键词
聚焦评价/三维测量/梯度方差/高斯拟合Key words
focus evaluation/three-dimensional measurement/gradient variance/Gaussian fitting引用本文复制引用
基金项目
国家自然科学基金(51975191)
湖北省科技创新人才基金(2023DJC048)
出版年
2024
NETL
NSTL
万方数据