傅里叶合成照明中的光场均匀化技术研究
Research on Uniformity of Illumination Field Intensity in Fourier Synthesis Illumination
李慧 1马钺洋 1尹皓玉 1韩晓泉 1黄宇峰 1吴晓斌1
作者信息
- 1. 中国科学院微电子研究所光电技术研发中心,北京 100029;中国科学院大学,北京 100049
- 折叠
摘要
在傅里叶合成照明结构的基础上,通过引入高频MEMS(Micro-electro-mechanical system)振动微镜作为光场均匀化装置,在实现任意离轴照明模式的基础上,可以进一步改善照明视场光强的均匀性,提高成像分辨率,改进后的照明方法具有结构简单、易于操作等优点.设计了傅里叶合成照明与均匀化结构方案,建立了仿真模型,搭建实验装置从成像方面进行了均匀化效果验证.在此基础上,详细分析MEMS微镜振动振幅、频率对均匀化效果的影响,在选定照明区域内均匀性最大可提高11%以上.所提的傅里叶合成照明和光场均匀化方法适用于光刻掩模检测等领域的照明应用.
Abstract
Based on a Fourier synthesis illuminator,high frequency MEMS(Micro-electro-mechanical system)vibration micromirror is introduced as an illumination field uniformizing device.In addition to the realization of any off-axis illumination modes,the optimized structure can further improve the intensity uniformity of illumination field and the imaging resolution.It has a simple structure and is easy to operate.The Fourier synthesis illumination and uniformizing structure scheme are designed,the simulation model is established,and the experimental device is set up to verify the uniformity effect through imaging method.In addition,the influences of the vibration amplitude and vibration frequency of the MEMS micromirror on the uniformizing effect are analyzed.The uniformity in the selected illumination area can be increased by more than 11%.The Fourier synthesis illumination and field intensity uniformizing method can be applied to the illumination applications in lithography mask inspection.
关键词
傅里叶合成照明/均匀性/振动微镜Key words
Fourier synthesis illumination/uniformity/vibration micromirror引用本文复制引用
基金项目
国家自然科学基金面上项目(62071464)
出版年
2024
NETL
NSTL
万方数据