摘要
互联网、超算中心、数据中心光互连等高速光通信领域,以及激光雷达、显示等应用,均对半导体激光器提出单模、单偏振态、高速、高功率等更高性能要求.本文梳理了以垂直腔面发射激光器(VCSEL)、光子晶体面发射激光器等为主的电注入表面发射型半导体激光器的研究进展,包括:为了同时实现单模和单偏振性,设计表面光栅、浮雕和高折射率对比度光栅VCSEL;为了实现单模高速特性,引入锌扩散区、建立横向耦合腔、构建多孔结构氧化限制VCSEL;为了实现单模、高功率性,采用构建慢光表面光栅负载VCSEL、引入锌扩散区、设计多结或多氧化孔径VCSEL等方式;为了实现突破性的单模、高功率、极小发散角等性能,采用光子晶体面发射激光器.最后对面发射激光器发展趋势做出展望.
Abstract
High-speed optical communication systems,such as the Internet,super-computing,and data center optical interconnections,and applications such as LiDAR and display,require higher performance for semiconductor lasers,such as the single mode,single polarization,high speed,and high power.This article presents a review of the research progress of surface-emitting semiconductor lasers,mainly consisting of vertical-cavity surface-emitting lasers(VCSELs)and photonic-crystal surface-emitting lasers.This includes designing surface grating,relief grating,and high-refractive-index contrast grating VCSELs to achieve the single mode and single polarization simultaneously.A zinc diffusion zone is introduced,a transverse coupling cavity is established,and a multi-hole-aperture oxide-confined VCSEL is constructed to achieve single-mode high-speed characteristics.A surface grating-loaded VCSEL for slow light is constructed,a zinc diffusion zone is introduced,and multi-junction or multi-aperture VCSELs are designed to achieve a single mode and high power.Photonic-crystal surface-emitting lasers are introduced to achieve a breakthrough performance of a single mode,high power,and minimal divergence angle.Finally,the development trends of surface-emitting lasers are discussed.
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