首页|基于球面补偿及光程匹配的靶丸表面形貌白光干涉测量方法

基于球面补偿及光程匹配的靶丸表面形貌白光干涉测量方法

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针对靶丸内外表面缺陷的测量问题,提出一种基于白光扫描干涉的零位显微干涉靶丸表面缺陷测量系统.将白光干涉技术与Linnik型显微干涉技术相结合,同时引入光程匹配模块以测量不同直径靶丸的不同表面,并基于球面零位干涉思想,引入球面作为参考面以扩大测量视场.实际测量中通过压电陶瓷实现对靶丸表面的垂直扫描,获取全视场白光干涉图像,运用移相算法以及蝙蝠翼校正算法实现靶丸表面的形貌复原.使用所提方法测量标准台阶板,所得测量值与标称值吻合,验证了测量方法的有效性,随后对靶丸进行了测量.结果表明,所提出的测量方法能够准确测量出靶丸内外表面的缺陷分布.
White-Light Interferometry for Measuring Surface Topography of Capsule Based on Spherical Compensation and Optical-Path Matching
To measure the defects on the inner and outer surfaces of a capsule,a null micro-interference capsule surface-defect measurement system based on white-light scanning interferometry is proposed.White-light interference technology is combined with Linnik micro-interference technology and an optical path-matching module is introduced to measure the different surfaces of different diameter capsules.Based on the concept of spherical null interference,a spherical surface is introduced as a reference surface to expand the measurement field-of-view.In actual measurements,piezoelectric ceramics are used to scan a capsule surface vertically,thus achieving a full-field white-light interference image.Phase-shifting and bat-wing correction algorithms are used to restore the morphology of the capsule surface.The proposed measurement method is built to measure the standard step plate,and the measured values are consistent with the nominal values,thus verifying the effectiveness of the measurement method.Subsequently,a capsule is measured.The results show that the proposed measurement method can accurately measure the distribution of defects on the inner and outer surfaces of the capsule.

white light interferometryinternal and external surface defectsspherical compensationoptical path matching

刘杨、郭仁慧、蒋金威、钱宇、薛亮、李建欣

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南京理工大学电子工程与光电技术学院,江苏 南京 210094

白光干涉 内外表面缺陷 球面补偿 光程匹配

2024

激光与光电子学进展
中国科学院上海光学精密机械研究所

激光与光电子学进展

CSTPCD北大核心
影响因子:1.153
ISSN:1006-4125
年,卷(期):2024.61(17)