Simultaneous Measurement Method of Six-Degree-of-Freedom Error of Precision Rotating Axis
This study proposes a method for simultaneous measurement of six-degree-of-freedom errors in precision rotating axes using absolute measurement.The proposed method addresses the limitations of current precision rotating shaft motion accuracy detection technologies,which are unable to balance high precision,efficiency,dynamic continuity,and comprehensive error measurement.Utilizing multi-wavelength phase-shifting interferometry,the method measures the instantaneous absolute pose of micro/nanostructure characteristic samples aligned with the rotational axis motion.It establishes a six-degree-of-freedom motion error model for precision rotating axes and identifies the mapping relationship between each degree of freedom error and the pose transformation of the standard micro/nanostructure feature space.By analyzing the characteristic spatial pose of micro and nanostructures,the six-degree-of-freedom error of the precision rotation axis is separated,enabling simultaneous,continuous,and high-precision measurements.Experiments conducted on a precision air bearing rotary table revealed an angle positioning error of 2.98",a tilt error of 0.91",a radial error of 399 nm,and an axial error of 37 nm.
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