新型扭转梁结构的电磁驱动式MEMS微镜
Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure
徐凡 1彭长四 2曾中明 3吴东岷3
作者信息
- 1. 苏州大学光电科学与工程学院,江苏 苏州 215006;中国科学院苏州纳米技术与纳米仿生研究所纳米加工平台,江苏 苏州 215123
- 2. 苏州大学光电科学与工程学院,江苏 苏州 215006
- 3. 中国科学院苏州纳米技术与纳米仿生研究所纳米加工平台,江苏 苏州 215123
- 折叠
摘要
为了提高MEMS(Micro-electro-mechanical system)微镜工作时的可靠性,设计了一款镜面尺寸为5 mm×6 mm,搭载新型扭转梁结构的电磁驱动式MEMS微镜.利用有限元分析算法对MEMS微镜进行仿真,提高其运动模态的设计合理性,并对所设计的结构完成工艺制备和封装.所制备的二维MEMS微镜具有工艺简单、制造成本低、转角稳定性强等优点.测试结果表明,搭载新型扭转梁结构的MEMS微镜可以实现双轴转动,其快轴谐振频率为1082.2 Hz,光学角度为 53.9°,慢轴工作频率为 60.0 Hz,光学角度为 20.8°.在稳定性测试中,机械半角误差为 0.21°,整体角度浮动小于2.6%.该二维MEMS微镜在有着大扫描角度的同时,稳定性也较强,能够满足MEMS激光雷达的使用需求.
Abstract
To improve the reliability of micro-electro-mechanical system(MEMS)micromirrors during their operation,an electromagnetically driven MEMS micromirror with a mirror measuring 5 mm×6 mm and a new torsion beam structure is designed.A finite-element simulation algorithm is used to simulate the MEMS micromirror,improve the design rationality of its motion mode,and complete the process preparation and encapsulation of the designed structure.The prepared two-dimensional MEMS micromirror offers the advantages of simple process,low manufacturing cost,and high corner stability.Test results show that the MEMS micromirror equipped with the new torsion beam can achieve biaxial rotation,with a fast-axis resonant frequency of 1082.2 Hz and an optical angle of 53.9°,as well as a slow-axis operating frequency of 60.0 Hz and an optical angle of 20.8°.The results of stability test indicate that its mechanical half-angle error is 0.21° and its overall angle fluctuation is less than 2.6%.This two-dimensional MEMS micromirror has a large angle and exhibits high stability,thus satisfying the demands of MEMS lidar.
关键词
光学器件/电磁驱动/有限元/扭转梁/微镜Key words
optical device/electromagnetic drive/finite element/torsion beam/micro mirror引用本文复制引用
出版年
2024
NETL
NSTL
万方数据