Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure
To improve the reliability of micro-electro-mechanical system(MEMS)micromirrors during their operation,an electromagnetically driven MEMS micromirror with a mirror measuring 5 mm×6 mm and a new torsion beam structure is designed.A finite-element simulation algorithm is used to simulate the MEMS micromirror,improve the design rationality of its motion mode,and complete the process preparation and encapsulation of the designed structure.The prepared two-dimensional MEMS micromirror offers the advantages of simple process,low manufacturing cost,and high corner stability.Test results show that the MEMS micromirror equipped with the new torsion beam can achieve biaxial rotation,with a fast-axis resonant frequency of 1082.2 Hz and an optical angle of 53.9°,as well as a slow-axis operating frequency of 60.0 Hz and an optical angle of 20.8°.The results of stability test indicate that its mechanical half-angle error is 0.21° and its overall angle fluctuation is less than 2.6%.This two-dimensional MEMS micromirror has a large angle and exhibits high stability,thus satisfying the demands of MEMS lidar.
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