Design of Beam-Mixing System Based on MEMS Panoramic LiDAR
Light detection and ranging(LiDAR)with micro-electromechanical system(MEMS)micromirrors at the core has the advantages of high resolution,miniaturization,and low price.However,problems still exist,including a small scanning angle and difficult construction of panoramic systems.Therefore,a novel on-chip all-silicon integrated 360° laser radar beam-mixing system is proposed in this study.A flexible beam was designed on top of the conical mirror to form a multidimensional torsion center.A combined traction mechanism of in-plane torsion and two-dimensional scanning driven by a MEMS comb driver was designed at the bottom of the conical mirror.A 360° annular space dynamic beam-mixing system was constructed with the top of the conical mirror as the rotation center and the bottom traction mechanism as the driving force.The kinematic characteristics of the beam-mixing system were analyzed by Coventor finite element software.Results show that under the driving voltage of 50 V,a single quadrangular mirror can obtain in-plane and out-of-plane twist angles of±29.32° and±1.8°,respectively,and form circular scanning and longitudinal fields of view covering 360° and 3.6°,respectively.The designed system solves the problem of the small field of view of MEMS LiDAR and realizes panoramic image acquisition.This research has provided a theoretical model of panoramic LiDAR for automatic driving.
micro-electromechanical system micromirrorrectangular-pyramid mirror360° panoramic imagingcomb drivers
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