基于MEMS全景激光雷达的束搅系统设计
Design of Beam-Mixing System Based on MEMS Panoramic LiDAR
翟雷应 1聂胜伟 2南敬昌 1王义杰2
作者信息
- 1. 辽宁工程技术大学电子与信息工程学院,辽宁 葫芦岛 125105;辽宁省无线射频大数据智能应用重点实验室,辽宁 葫芦岛 125105
- 2. 辽宁工程技术大学电子与信息工程学院,辽宁 葫芦岛 125105
- 折叠
摘要
以微机电系统(MEMS)微镜为核心的激光雷达具有高分辨率、小型化、低成本的优点,但存在着扫描角度小,全景系统构建困难等问题.为此,提出了一种新颖的片上全硅集成的360°激光雷达束搅系统.在锥镜顶部设计了柔性梁,形成多维度扭转中心,在锥镜底部设计了MEMS梳齿驱动器驱动的面内扭转及二维扫描联合牵引机构,构建了以锥镜顶部为旋转中心,以底部牵引机构为驱动的360°环带空间动态光束搅系统.采用Coventor有限元软件分析了束搅系统的运动特性.结果表明,四棱锥镜的单个镜面在50 V的驱动电压下,能够获得±29.32°的面内扭角和±1.8°的离面扭角,形成覆盖360°的环形扫描视场和3.6°的纵向视场.所设计的系统解决了目前MEMS激光雷达视场角较小的问题,实现了全景图像采集.该研究为自动驾驶提供了全景激光雷达的理论模型.
Abstract
Light detection and ranging(LiDAR)with micro-electromechanical system(MEMS)micromirrors at the core has the advantages of high resolution,miniaturization,and low price.However,problems still exist,including a small scanning angle and difficult construction of panoramic systems.Therefore,a novel on-chip all-silicon integrated 360° laser radar beam-mixing system is proposed in this study.A flexible beam was designed on top of the conical mirror to form a multidimensional torsion center.A combined traction mechanism of in-plane torsion and two-dimensional scanning driven by a MEMS comb driver was designed at the bottom of the conical mirror.A 360° annular space dynamic beam-mixing system was constructed with the top of the conical mirror as the rotation center and the bottom traction mechanism as the driving force.The kinematic characteristics of the beam-mixing system were analyzed by Coventor finite element software.Results show that under the driving voltage of 50 V,a single quadrangular mirror can obtain in-plane and out-of-plane twist angles of±29.32° and±1.8°,respectively,and form circular scanning and longitudinal fields of view covering 360° and 3.6°,respectively.The designed system solves the problem of the small field of view of MEMS LiDAR and realizes panoramic image acquisition.This research has provided a theoretical model of panoramic LiDAR for automatic driving.
关键词
微机电系统微镜/棱锥微镜/360°全景成像/梳齿驱动器Key words
micro-electromechanical system micromirror/rectangular-pyramid mirror/360° panoramic imaging/comb drivers引用本文复制引用
出版年
2024
NETL
NSTL
万方数据