Effect of high temperature heat treatment on Zn components in CdZnTe substrates
As the quality of CdZnTe substrate for high performance HgCdTe infrared detectors continues to improve,the development of high quality CdZnTe substrate materials is imperative.The substrate high temperature heat treat-ment process with vacuum high temperature heat treatment temperature field and source control is used to systemati-cally study the influence of the main heat treatment parameters on the Zn component in CdZnTe substrates.An empiri-cal formula for controlling the Zn component in heat treatment is given to preliminarily obtain the compositional control of the Zn component in the CdZnTe substrate and the method of high-component uniformity distribution,which im-proves the quality of the CdZnTe substrate.
NETL
NSTL
万方数据
