高温热处理对碲锌镉衬底中Zn组分的影响
Effect of high temperature heat treatment on Zn components in CdZnTe substrates
范叶霞 1刘江高 1张立超 1周振奇 1李振兴 1折伟林1
作者信息
- 1. 中国电子科技集团公司第十一研究所,北京 100015
- 折叠
摘要
随着高性能碲镉汞红外探测器对碲锌镉衬底质量要求的不断提高,研制高质量的碲锌镉衬底材料势在必行.本文采用真空高温热处理温场与源控制的衬底高温热处理工艺,系统地研究了主要热处理参数对碲锌镉衬底中Zn组分的影响,给出了 Zn组分控制的热处理经验公式,初步获得了碲锌镉衬底中Zn组分的成分控制和高组分均匀性分布的方法,提高了碲锌镉衬底质量.
Abstract
As the quality of CdZnTe substrate for high performance HgCdTe infrared detectors continues to improve,the development of high quality CdZnTe substrate materials is imperative.The substrate high temperature heat treat-ment process with vacuum high temperature heat treatment temperature field and source control is used to systemati-cally study the influence of the main heat treatment parameters on the Zn component in CdZnTe substrates.An empiri-cal formula for controlling the Zn component in heat treatment is given to preliminarily obtain the compositional control of the Zn component in the CdZnTe substrate and the method of high-component uniformity distribution,which im-proves the quality of the CdZnTe substrate.
关键词
碲锌镉/性能改进/Zn组分/组分可调/组分均匀分布Key words
CdZnTe/performance improvement/Zn component/adjustable component/uniformly distributed component引用本文复制引用
出版年
2024
NETL
NSTL
万方数据