基于Root-MUSIC算法的激光扫频干涉测量方法研究
Research on laser swept-frequency interference measurement method based on the Root-MUSIC algorithm
金陈凯 1许新科 1刘易 1何泽聪 1宋云峰 2何闻3
作者信息
- 1. 中国计量大学计量测试工程学院,杭州 310018
- 2. 舜宇集团有限公司,浙江宁波 315499
- 3. 浙江大学,杭州 310058
- 折叠
摘要
玻璃的厚度作为工业生产中的一项重要的指标,如何对其快速的测量成为了研究热点.提出采用激光扫频干涉测量方法,将采样的信号进行插值拟合,校正其拍频非线性,再通过频谱估计法获取距离信息.当测量厚度较小的玻璃时,FFT算法因受栅栏效应和频谱干涉的影响,导致难以在频谱图中将玻璃前后表面的频率区分出来.为解决该问题,采用Root-MUSIC算法处理信号,实验结果表明在FFT算法分辨临近目标频率失效的情况下,Root-MUSIC算法可以进行有效区分,运算效率也远高于MUSIC算法,且精度可达50微米左右,为解决玻璃厚度测量问题提供了思路.
Abstract
The thickness of glass,as a crucial index in industrial production,has become a research hotspot for its rapid measurement.This paper proposes the use of laser scanning interferometry,interpolating the sampled signals,correcting the beat frequency nonlinearity,and then obtaining distance information through spectral estimation.When measuring thinner glass,the FFT algorithm is affected by the fence efect and spectral interference,making it difficult to distinguish the frequency of the front and back surfaces of the glass in the spectrum.To address this issue,this pa-per employs the Root-MUSIC algorithm to process the signal.Experimental results show that when the FFT algorithm fails to resolve adjacent target frequencies,the Root-MUSIC algorithm can effectively distinguish them.The computa-tional efficiency is also much higher than the MUSIC algorithm,and the accuracy can reach 0.05 μm,providing a so-lution for the problem of glass thickness measurement.
关键词
激光扫频干涉测距/厚度测量/Root-MUSIC算法/测距Key words
laser swept-frequency interference ranging/thickness measurement/Root-MUSIC algorithm/ran-ging引用本文复制引用
基金项目
浙江省自然科学基金(LY19F050008)
出版年
2024
NETL
NSTL
万方数据