A Simulation Method and Verification for Cleanroom Particle Concentration Based on the Sampling Mechanism of Particle Counters
Cleanliness,indicated by particle concentration levels,is a pivotal control parameter in cleanrooms.Levering the sampling mechanism of particle counters,this research introduces a transient Computational Fluid Dynamics(CFD)simulation technique for the precise prediction of particle concentrations within cleanroom environments.Building on the Lagrangian discrete phase model,the study integrates an equivalent model of the particle counter to emulate the dynamic transit of air and particles through the sampling ports.Verification was conducted using an experimental setup,and the outcomes showed good congruence between simulation and actual measurements.The advancements made herein not only furnish a novel approach for simulating cleanroom particle concentrations but also bolster the optimization of HVAC system designs.
CleanroomParticle concentrationSampling mechanism of particle countersCFD
万方数据
维普
