Particle monitoring failure and countermeasures in semiconductor ultrapure water
Nanoparticles are the core micropollution control index of semiconductor ultrapurewater,and online monitoring of 100nm and 50nm particle concentration has become a key measure to ensure the water consumption of 12-inch semiconductor production process.At the point of delivery(POD)of the ultrapure water preparation system,the laser particle counter(LPC)has a monitoring alarm,which affects the operation of the ultrapure water preparation system and the production early warning of the process equipment.This study briefly describes the influence of nanoparticles in ultrapure water on semiconductor production process,and analyzes the cause of misjudgment alarm caused by the accumulation of micro and nano bubbles(MNBs)measured by optical sensor.Through the pilot test of sampling desorption system(SDS),83％of the particle concentration interference formed by the bubble particles is eliminated,and the real online value is restored(the average detection value is 0.06pcs/mL),which provides a stable guarantee for the quality control of semiconductor factory wet cleaning.
Ultrapure waterUltrapure water preparation systemPoint of deliveryMicronano bubbleNanoparticleLaser particle counter
万方数据
维普
