洁净与空调技术2024,Issue(3) :61-64.

尘埃粒子计数器计数效率检测研究

Research on the counting efficiency of Airborne particle counter

厉龙 肖坤坤 暴海霞 吴嘉炜 汤文良
洁净与空调技术2024,Issue(3) :61-64.

尘埃粒子计数器计数效率检测研究

Research on the counting efficiency of Airborne particle counter

厉龙 1肖坤坤 1暴海霞 1吴嘉炜 1汤文良1
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作者信息

  • 1. 苏州市计量测试院
  • 折叠

摘要

尘埃粒子计数器是洁净室等级监测的关键仪器,计数效率是核心性能指标,针对新版GB/T 25915.1-2021要求,使用标准聚苯乙烯微球按GB/T 29024.4实施检测,粒径档设定误差不超过±10%,0.3µm计数效率48%,0.5µm计数效率92%,结果表明计数效率和粒径档设定误差、计数重合损失密切相关,在粒径档设定误差不超过±10%,且检测浓度点不大于最大颗粒计数浓度的25%时,尘埃粒子的计数效率测试结果比较理想.

Abstract

Airborne particle counter is the key instrument for clean spaces monitoring,and counting efficiency is the core performance index.In terms of GB/T 25915.1-2021 requirements,tests are performed using standard polystyrene microspheres according to GB/T 29024.4.The results show that the error of particle size setting is less than±10%,the counting efficiency of 0.3pm and 0.5 pm is 48%and 92%,respectively.Counting efficiency is closely related to particle size setting error and counting loss.Only when the particle size setting error is less than±10%,and the detection concentration point is also less than 25%of the maximum particle counting concentration,the ideal counting efficiency results could be acquired.

关键词

标准聚苯乙烯微球/尘埃粒子计数器/计数效率/检测

Key words

Standard polystyrene microspheres/Airborne particle counter/Counting efficiency/Test

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基金项目

国家市场监督管理总局科技计划项目(2021MK038)

出版年

2024
洁净与空调技术
中国电子工程设计院 中国电子学会洁净技术分会

洁净与空调技术

影响因子:0.264
ISSN:1005-3298
参考文献量4
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