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电子洁净空调系统工程设计实例

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电子洁净厂房的建设对洁净室系统要求较高,尤其是温度和湿度指标.以无锡某实际工程项目为案例,对该项目的冷热源系统、洁净空调系统、通风系统的设计进行了详细介绍,通过上述三个系统的协同运行,满足了洁净室百级区(温度22℃±0.25℃、湿度45%±7%)和千级区(温度22℃±1℃、湿度45%±10%)的设计要求,为后续洁净厂房的建设提供参考价值.
Example of engineering design of electronic clean air conditioning system
The construction of electronic clean workshop has high requirements for clean room system,especially temperature and humidity indicators.Taking a practical engineering project in Wuxi as an example,the design of the project's cold and heat source system,clean air conditioning system and ventilation system is introduced in detail.Through the cooperative operation of the above three systems,the design requirements of the clean room thousand-level zone(temperature 22±0.25℃,humidity 45±7%)and the 100-level zone(temperature 22±1℃,humidity 45±10%)are met.It provides reference value for the subsequent construction of clean workshop.

Clean air conditioningAir cooling unitFresh air unitVentilation systemPurification gradeTemperaturehumidness

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无锡光子芯片联合研究中心

洁净空调 风冷机组 新风机组 通风系统 净化等级 温度 湿度

2024

洁净与空调技术
中国电子工程设计院 中国电子学会洁净技术分会

洁净与空调技术

影响因子:0.264
ISSN:1005-3298
年,卷(期):2024.(4)