电子制程特种气体管路检测关键技术研究
The research focuses on the key technology for detecting special gas pipelines in electronic processes
李帅 1张志麒 1郭凯1
作者信息
摘要
特种气体系统质量直接关系到电子工厂的生产安全和产品良率,聚焦特气系统投用前的测试验收技术,从相关标准、检测方法等方面进行分析,并基于已有项目实践经验,对电子制程特种气体管路五项测试中常见的检测数据偏离限值提供主要的原因分析,为类似案例出现异常时的排障工作提供参考思路.
Abstract
The quality of special gas system is directly linked to the production safety and product yield of electronic factories.This paper concentrates on the testing and acceptance technologies for special gas systems prior to their deployment,analyzing relevant standards,detection methods,and providing a primary cause analysis for common deviations from limit values in the five tests of special gas pipelines for electronic processes based on practical project experience.It aims to offer reference guidance for troubleshooting work when similar anomalies occur.
关键词
特种气体管路/五项测试/异常工况分析Key words
Special Gas Piping/Five Tests/Abnormal Condition Analysis引用本文复制引用
出版年
2024
NETL
NSTL
万方数据