The research focuses on the key technology for detecting special gas pipelines in electronic processes
The quality of special gas system is directly linked to the production safety and product yield of electronic factories.This paper concentrates on the testing and acceptance technologies for special gas systems prior to their deployment,analyzing relevant standards,detection methods,and providing a primary cause analysis for common deviations from limit values in the five tests of special gas pipelines for electronic processes based on practical project experience.It aims to offer reference guidance for troubleshooting work when similar anomalies occur.
Special Gas PipingFive TestsAbnormal Condition Analysis
NETL
NSTL
万方数据
