Industrial CT is a non-destructive testing technology,which can be used for dimensional measurement and defect analysis of the internal structure of objects.Industrial CT spatial resolution refers to the ability of industri-al CT equipment to detect the smallest details in space,and is an important index to measure the detection perform-ance of industrial CT equipment.In this project,a set of industrial CT spatial resolution standard was developed by combining lithography technology,and its morphology observation and value tracing were carried out through various measurement methods,and the spatial resolution of industrial CT equipment was calibrated.
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