Development of a Thermal Conductivity Testing Device for Thin Films
Nano-carbon composite films have excellent heat and heat transfer properties,and are regarded as a new generation of thermal management materials,which have been widely used in the industry.Accurate measure-ment of thermal conductivity is an important index to evaluate heat transfer performance.Based on the principle of 3ωmethod,this paper builds a test device for the thermal conductivity of thin films,which is used to measure the thermal conductivity and thermal diffusivity of nano-carbon composite films,and uses SiO2 films to verify the relia-bility of the device.The results show that the deviation between the thermal conductivity of SiO2 film and the stand-ard value in the literature is less than 5%,and the device can effectively measure the thermal conductivity of the film.