Test Method of Semiconductor Gas Sensor Based on MEMS
In order to solve the problems such as large detection autonomy and lack of consistency of semiconductor gas sensors in MEMS,the sensor is comprehensively evaluated and its performance is promoted.The detection meth-ods are studied in this paper.The detection items include sensor detection error,drift,temperature and humidity in-fluence test,vibration drop test,long-term stability test and other general items.And the special performance pa-rameters of the sensor such as power,sensor detection limit,response time and recovery time.
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维普
