Low Cost and High Precision Preparation Device for Trace Gas
Aiming at the low accuracy of static gas distribution method,a set of gas preparation equipment with low cost,high precision and ultra-low concentration was designed and developed.The device adopts partial pressure distribution method,integrates vacuum technology,combines mass flowmeter and precision barometer,optimizes cost structure through background gas and three-way target gas multiplexing mass flow controller and high-speed on-off valve,and combines pneumatic diaphragm valve and high-speed on-off valve to control the partial pres-sure increment of gas components.The results show that the device has good universality and has significant advan-tages in the field of preparation and application of ultra-low concentration gas.
万方数据
维普
