Aiming at the low accuracy of static gas distribution method,a set of gas preparation equipment with low cost,high precision and ultra-low concentration was designed and developed.The device adopts partial pressure distribution method,integrates vacuum technology,combines mass flowmeter and precision barometer,optimizes cost structure through background gas and three-way target gas multiplexing mass flow controller and high-speed on-off valve,and combines pneumatic diaphragm valve and high-speed on-off valve to control the partial pres-sure increment of gas components.The results show that the device has good universality and has significant advan-tages in the field of preparation and application of ultra-low concentration gas.
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