Thin film thermocouples enable accurate measurement of solid surface temperature.In this paper,the sur-face copper-copper-nickel alloy(Constantan)thin film thermocouple was prepared by magnetron sputtering process.A preparation method based on magnetron sputtering and annealing process was proposed by analyzing the sputtering parameters that affect the film forming quality.The results show that the operating temperature range of the thermocouple is(-60～300)℃,and the output is 4.827 mV at 300℃.The maximum absolute error value of this method is not more than 0.2℃,and the sum of squares of error is 0.00024174mV2,which is better than the traditional method.
关键词
薄膜热电偶/研制/最小二乘法/分度方法
Key words
thin film thermocouples/preparation/least square/scaling method
维普
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