Flexible Stopper Design for MEMS Accelerometers Under High Shock
The stop structure is one of the common techniques to improve the impact reliability of MEMS accelerom-eters.The flexible stop structure is designed by dynamic simulation,and the impact area on the mass block is de-signed as three flexible beams and three stop bosses.At the same time,based on ANSYS dynamics module,the colli-sion behavior of mass blocks under 10000g half-sine acceleration is analyzed.The results show that the maximum shear stress on the bonding surface of the structure is 4.16MPa,which is lower than the shear strength of the silica-glass anode bonding interface,and the maximum principal stress on the flexible beam is 0.13GPa,which is lower than the tensile strength of monocrystalline silicon.Therefore,the expected goal can be achieved.
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维普
