The Working Principle of NMAT and Research on Its Calibration Method
This paper introduces the structure and main function of each component of the nano-electromagnetic force driven sensor(NMAT),and its working principle.The calibration method of force value and displacement is studied,and the measurement results are analyzed.The results show that the calibration results of force value in one direction can represent the technical index of force value.F1,E2 grade standard weights and capacitive micrometer meet the technical requirements of the corresponding parameters.This method can provide reference for calibration work.
万方数据
维普
