Surface Microtopography Measurement Based on White-light Interferometry
In this paper,the application range of non-contact measurement methods such as scanning microscopy,optical interferometry,laser scattering and confocal microscopy are analyzed from the point of view of measurement principle and technical characteristics.At the same time,according to the interference characteristics and working principle of white light interferometry,the signal processing algorithm,data processing and parameter evaluation process are studied,and the three-dimensional surface morphology,surface roughness and scratch depth are meas-ured and evaluated.Experimental results show that this method has significant advantages in the accurate measure-ment of three-dimensional surface microtopography,and the precision is high,which can provide technical support for its quality assessment.
万方数据
维普
