Research on Preparation Technology of Single Atomic Step Height Scale
The step height of VLSI is an important parameter in the design,development and production of IC.Rapid and accurate measurement of its height parameters is an important means to ensure chip quality and im-prove production efficiency.Atomic force microscope(AFM)is a new type of microscope measurement tool with a-tomic resolution,which is widely used in the field of nanotechnology.Since the atomic step height reference material can be traced to the SI unit,it is of great significance to develop the single atomic step height sample to ensure the accuracy and reliability of the measuring instrument.
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维普
