Simulation Analysis of the Surface Quality in Deliquescent Polishing of KDP Crystals
Through kinematic analysis,the motion equation of a point on the surface of KDP crys-tal relative to the polishing pad was obtained.The simulation graphics of the number of rotations of the sample disk,the horizontal distance between the center of the sample disk and the center of the polishing pad,the horizontal distance between the center of the sample disk and its swinging center,and the mo-tion trajectories of a point on the surface of KDP crystal relative to the polishing pad at different values of the swinging period were drawn.The influence of these parameters on the surface quality of KDP crystal was obtained,and the optimization direction of these parameters was determined based on this.
万方数据
维普
