基于PLC控制的晶圆检测系统的设计与实现
Design and Implementation of Wafer Detection System Based on PLC Control
邹春太 1张军1
作者信息
- 1. 沈阳芯源微电子设备股份有限公司,辽宁沈阳 110168
- 折叠
摘要
文章设计了晶圆检测系统,用于晶片盒中晶圆位置状态的检测.通过重复测试,验证了本晶圆检测系统在检测晶圆在晶片盒中位置状态和晶圆数量的准确性,达到了预期设计要求.
Abstract
The article designs a wafer detection system for detecting the position and status of wafers in chip boxes.Through repeated testing,the accuracy of the wafer detection system in detecting the position status and number of wafers in the wafer box has been verified,meeting the expected design requirements.
关键词
晶圆位置检测/伺服电机/反馈/数据处理Key words
wafer position detection/servo motor/feedback/data processing引用本文复制引用
出版年
2024
NETL
NSTL
万方数据