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高精度集成感应电路互连技术研究

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文章通过建立微盲孔填铜模型、刚性电路板高厚径比和挠性电路板通孔电镀铜模型,同时基于电化学测试结果进行电镀铜的数值模拟计算,对镀液对流对浓度边界层的影响、加速剂在电极表面的积累效应、镀层均匀性、镀槽内电场分布和添加剂作用机制等进行了分析.通过设计印制电路图形,对图形电镀镀层均匀性影响因素进行分析,以此确定最优工艺和参数;达到电镀铜表面同层厚度的均匀性与填铜的平整性效果,从而达到了减小盲孔孔径直径,降低孔深、铜层、面铜厚度和抗蚀膜厚度的目的.通过研究,文章实现了高密度互连印制电路板线路的微细化,达到了电气互连孔更小、密度更高,可靠性和感应程度更强的效果.
Research on Interconnection Technology of High-precision Integrated Inductive Circuits
The article through the establishment of blind hole filling copper model,rigid circuit board high thickness to diameter ratio and flexible circuit board through-hole plating copper model.At the same time,based on electrochemical test results of copper plating numerical simulation calculations,the plating solution convection on the concentration of the boundary layer of the influence of the accelerator on the surface of the accumulation effect of the electrode,the uniformity of the plating layer,plating bath in the electric field distribution,the role of the additives mechanism and so on were analyzed.Through the design of printed circuit graphics,graphic electroplating plating uniformity of factors affecting the analysis,in order to determine the optimal process and parameters.Achieving the plating of copper surface homogeneity of the thickness of the same layer with the effect of filling the flatness of copper,so as to achieve the purpose of reducing the diameter of the blind hole aperture diameter,reduce the depth of holes,the copper layer,the surface of the thickness of the copper layer and the thickness of corrosion-resistant film.Through the study,the article realized the microfabrication of high-density interconnection printed circuit board lines,and achieved the effect of smaller electrical interconnection holes,higher density,reliability and induction degree.

circuit interconnectblind hole fillingcopper platingcircuit boards

王建全、李保霞、刘徐、付晓丽

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四川经科企业管理服务有限公司,四川遂宁 629000

电路互连 盲孔填铜 电镀铜 电路板

2024

今日自动化

今日自动化

ISSN:
年,卷(期):2024.(3)
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