卫星展开机构用热刀切割器大气失效机理分析
Atmospheric Failure Mechanism of Thermal Knife Used in Satellite Deployment Components
陈炜 1李庆林 2王鹏 3强志青 4崔琦峰 4乔丽3
作者信息
- 1. 兰州理工大学 材料科学与工程学院,兰州 730050;中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州 730030
- 2. 兰州理工大学 材料科学与工程学院,兰州 730050
- 3. 中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州 730030
- 4. 上海宇航系统工程研究所,上海 201100;中国航天科技集团有限公司 空间结构与机构技术实验室,上海 201100
- 折叠
摘要
目的 分析图案化电阻Pt薄膜在大气环境下使用寿命下降的原因.方法 基于此,选取现有型号热刀切割器图案化电阻薄膜,制备不同厚度Pt/Ti膜,重点考察大气环境下薄膜表界面形貌、成分、晶体结构随温度的变化规律及其对电阻率特性以及力学性能影响.结果 大气高温下,Ti过渡层从底层扩散至表面与Pt形成合金,部分Ti扩散至表面被氧化,合金化与氧化导致薄膜电阻率先升高后降低.同时,充当Pt薄膜与基底之间"黏合剂"的Ti过渡层扩散耗尽,导致Pt薄膜与氮化硅基底结合力降低.结论 以上因素最终导致了图案化薄膜热刀大气高温环境下切割寿命下降.
Abstract
The work aims to analyze the reasons for the decrease in service life of patterned resistive Pt thin films in atmos-pheric environments.Based on this,existing models of patterned resistance films of thermal knives were selected to prepare Pt/Ti films with different thickness.The changes of surface morphology,composition and crystal structure of the films with temperature in the atmospheric environment and their effects on resistivity and mechanical properties were investigated.It was found that at high atmospheric temperature,the Ti transition layer diffused from the bottom to the surface to form alloys with Pt,and part of Ti dif-fused to the surface to be oxidized,resulting in the trend of first increase and then decrease of the film resistance.At the same time,the Ti transition layer acting as the"adhesive"between the Pt film and the substrate,was exhausted by diffusion,resulting in a de-crease in the binding force between the Pt film and the silicon nitride substrate.The above factors ultimately lead to the reduction in the cutting life of the thermal knife with patterned films as the core when used at high temperature in the atmospheric environment.
关键词
图案化薄膜/热刀切割器/磁控溅射/失效机理/铂基薄膜/热稳定性Key words
patterned film/thermal knife/magnetron sputtering/failure mechanism/platinum-based film/thermal stability引用本文复制引用
基金项目
中国科学院战略性先导科技专项(XDB0470302)
国家自然科学基金(52061026)
国家自然科学基金(51561021)
甘肃省自然科学基金(23JRRA752)
甘肃省科技特派员(23CXGA0026)
甘肃省基础研究创新群体项目(20JR10RA062)
甘肃省重大科技专项(22ZD6GA002)
山东省先进材料与绿色制造实验室科研资助项目(SYS202203)
出版年
2024
NETL
NSTL
万方数据