Controlled fabrication and magnetic properties of anisotropic micron-sized Nd-Fe-B films
With the rapid development of microelectromechanical systems(MEMS)technology,micron-sized Nd-Fe-B films are increasingly used in precision sensors,actuators and drivers.In this work,we systematically investigates the effects of process parameters,including Ar gas pressure control,sputtering power,deposition temperature,an-nealing temperature,and the design of the Nd diffusion layer,on the growth,magnetic anisotropy,and coercivity of micron-sized Nd-Fe-B films.The results indicate that appropriate annealing treatment can improve the microstruc-ture of the films and enhance their perpendicular magnetic anisotropy,while the rational design of the Nd diffusion layer thickness and number combination helps further improve the coercivity.By optimizing the preparation process,the magnetic performance of micron-sized Nd-Fe-B films can be effectively enhanced,promoting their application in MEMS devices.
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