FeCoB/Ni-Zn ferrite multilayer film chip inductors with excellent inductive properties at near-GHz frequencies
A segmented magnetic core structure based on FeCoB/Ni-Zn ferrite multilayer films for the design and fabrication of novel racetrack-type thin-film inductive components was proposed.FeCoB/Ni-Zn ferrite multilayer films with high saturation magnetization and in-plane magnetic anisotropy were fabricated using magnetron sputte-ring and employed as the core material.The results show that the new inductor exhibits a 20％increase in Q factor at 500 MHz,with a working frequency reaching 900 MHz,demonstrating excellent inductive characteristics near-GHz frequencies.The segmented magnetic core structure effectively suppresses eddy current losses,while the high saturation magnetization and in-plane magnetic anisotropy of the multilayer films enhance the stable operating fre-quency of the inductor.New insights was provided for the design of high-performance chip inductors and holds promise for meeting the stringent requirements of power management systems in edge devices.
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