FeCoB/Ni-Zn铁氧体多层膜芯片电感近GHz优异电感特性
FeCoB/Ni-Zn ferrite multilayer film chip inductors with excellent inductive properties at near-GHz frequencies
赵晨阳 1邹吕宽 2赵雪 1罗曦 1何峻 1曾中明 2赵栋梁1
作者信息
- 1. 钢铁研究总院有限公司功能材料研究院,北京 100081
- 2. 中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州 215123
- 折叠
摘要
提出了一种基于FeCoB/Ni-Zn铁氧体多层薄膜的分段磁芯结构,用于设计和制备新型跑道型薄膜电感元件.通过磁控溅射法制备了具有高饱和磁化强度和面内磁各向异性的FeCoB/Ni-Zn铁氧体多层薄膜,并将其作为磁芯材料.结果表明,该新型电感在500 MHz下的Q值提高了 20％,工作频率达到了 900 MHz,展现了优异的近GHz电感特性.分段磁芯结构有效抑制了涡流损耗,而多层薄膜的高饱和磁化强度和面内磁各向异性则提高了电感的稳定工作频率.为高性能芯片电感的设计提供了新的思路,有望满足边缘设备对电源管理系统的严苛要求.
Abstract
A segmented magnetic core structure based on FeCoB/Ni-Zn ferrite multilayer films for the design and fabrication of novel racetrack-type thin-film inductive components was proposed.FeCoB/Ni-Zn ferrite multilayer films with high saturation magnetization and in-plane magnetic anisotropy were fabricated using magnetron sputte-ring and employed as the core material.The results show that the new inductor exhibits a 20％increase in Q factor at 500 MHz,with a working frequency reaching 900 MHz,demonstrating excellent inductive characteristics near-GHz frequencies.The segmented magnetic core structure effectively suppresses eddy current losses,while the high saturation magnetization and in-plane magnetic anisotropy of the multilayer films enhance the stable operating fre-quency of the inductor.New insights was provided for the design of high-performance chip inductors and holds promise for meeting the stringent requirements of power management systems in edge devices.
关键词
芯片电感/FeCoB/Ni-Zn铁氧体/多层薄膜/分段磁芯/高频性能Key words
on-chip inductor/FeCoB/Ni-Zn ferrite/multilayer film/segmented core/high-frequency performance引用本文复制引用
出版年
2024
NETL
NSTL
万方数据