大角度线性偏转的电热式微镜仿真设计
Simulation Design of Electrothermal Micro Mirror with Large Angle Linear Deflection
和学泰 1祝方舟 2邵光笑 1李庆党3
作者信息
- 1. 青岛科技大学机电工程学院 青岛 266100
- 2. 青岛科技大学中德科技学院 青岛 266100
- 3. 青岛科技大学机电工程学院 青岛 266100;青岛科技大学中德科技学院 青岛 266100
- 折叠
摘要
MEMS微镜虽种类繁多,但是能够实现大角度偏转能力的MEMS微镜却很少,能够实现线性偏转能力的MEMS微镜更是屈指可数.论文针对现有MEMS微镜偏转角度小、偏转能力不可控以及无法线性偏转等问题,提出了一种新型的电热式MEMS微镜结构,该结构具备较大的微镜反射平面,并且镜面平整光滑,反射率较高.不仅能够实现119°的大角度偏转能力,还具有在0～3 V内的电压—角度线性偏转的能力.
Abstract
Although there are many kinds of MEMS micromirrors,there are few MEMS micromirrors that can realize large an-gle deflection,and there are few MEMS micromirrors that can realize linear deflection.In this paper,aiming at the problems of small deflection angle,uncontrollable deflection ability and inability of linear deflection of the existing MEMS micro mirror,a new electrothermal MEMS micro mirror structure is proposed.The structure has a large micro mirror reflection plane,flat and smooth mirror and high reflectivity.It can not only realize 119°large angle deflection,but also has the ability of voltage angle linear deflec-tion within 0～3 V.
关键词
微光机电系统/电热式微镜仿真/线性偏转MEMS微镜/大角度偏转微镜Key words
MOEMS/micro simulation of electrothermal micro mirror/linear deflection MEMS micro mirror/large angle de-flection micro mirror引用本文复制引用
出版年
2024
国家科技期刊平台
NSTL
万方数据