Micro-vibration Response Analysis of Semiconductor Workshop with Different Structural Parameters
In order to study the influence of structural parameters on the vibration response of the workshop,this paper conducts a micro-vibration test at the workshop location.The trigonometric series method is adopted to simulate the micro-vibration wave as an excitation.The 1/3-octave band analysis method is used to process the velocity of measurement points,which contributes to the analysis of the influence of structural parameters on the vibration velocity response of the workshop.The results show that the vibration velocity response of each measurement point has sufficient safety reserve in the frequency band higher than 10 Hz,which meets the requirements of the VC-C vibration control standard.With the increase of the concrete strength of the columns,the increase of the column cross-section size,or the decrease of the column network size,the peak velocity of the workshop decreases in the X and Y directions,and increases in the Z direction.
micro-vibrationsemiconductor workshopstructural parameters1/3-octave band
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